INDUSTRIAL AUTOMATION

Manufacturing facilities in the semiconductor industry

When sub-microns matter: precision monitoring for semiconductor manufacturing

In semiconductor production, even the smallest vibration can have an outsized impact. As structures and process geometries become increasingly delicate, manufacturing equipment and facilities must operate with exceptional stability.

That’s where high-precision inertial sensor technology makes all the difference.

The ASC EQ series is designed to capture extremely low frequency and amplitude accelerations, making these sensors ideal for monitoring sensitive manufacturing environments. By identifying minute vibrations and structural movements, they provide valuable data to assess facility and equipment stability – before disturbances can compromise critical processes.

For outstanding measurement accuracy and repeatability, ASC QBA-1515 servo-balanced quartz accelerometers add another level of confidence. Their combination of high resolution, low noise, minimal deviation and excellent long-term stability makes them particularly suited to high-precision manufacturing equipment and semiconductor facilities.

From detecting subtle environmental vibrations to supporting reliable, repeatable processes, ASC inertial sensors help manufacturers create the stable conditions that advanced semiconductor production requires.

Want to explore how precision vibration measurement can strengthen your manufacturing environment? Let’s talk!

Would you like a consultation or further information?

Please get in touch. We would be glad to support you personally.

E-mail: service[at]asc-sensors.de

Phone: +49 8441 786547-0

Sensor selection

ASC EQ-2211

Biaxial, capacitive
Measurement range: ±3 and ±5 g
Noise density: <1.2 µg/√Hz
Frequency range (±3 dB): DC to 700 Hz

ASC EQ-1211

Uniaxial, capacitive
Measurement range: ±3 and ±5 g
Noise density: <1.2 µg/√Hz
Frequency range (±3 dB): DC to 700 Hz

ASC EQ-3211

Triaxial, capacitive
Measurement range: ±3 and ±5 g
Noise density: <1.2 µg/√Hz
Frequency range (±3 dB): DC to 700 Hz

ASC QBA-1515

Uniaxial, Q-MEMS
Measurement range: ±30 g
Resolution: 1 µg
Stability: K1: 1200 ppm | K0: 1.2 mg

All industries at a glance

ASC supplies high-precision inertial sensor solutions for demanding measurement tasks in several industries. Our engineers have a deep understanding of a wide variety of applications – for example in the rail transport sector, the automotive industry or for structural health monitoring systems. Discover now the diverse options that sensors from ASC offer you.

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Inquiry: Manufacturing facilities in the semiconductor industry

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ASC 5511LN

Triaxial, capacitive
Measurement range: ±2 to ±400 g
Noise density: 7 to 400 µg/√Hz
Frequency range (±5 %): DC to 2000 Hz

ASC P313P-A15

Triaxial, IEPE
Measurement range: ±16 to ±800 g
Frequency range (±10 %): 1.5 Hz to 12 kHz
Scale factor: 10 mV/g to 500 mV/g